年度93
論文名稱Batch Sequencing for Run-to-Run Control: Application to Chemical Mechanical Polishing
全部作者Chen, Yih-hang; Su, An-jhih; Shiu, Sheng-jyh; Yu, Cheng-ching; Shen, Shih-haur
卷數Industrial & Engineering Chemistry Research 44(13), pp4676-4686
ISSN(ISBN)1520-5045;0888-5885
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